高純氣體用壓力錶 (Ultra High Purity Pressure Gauge)
SAFE-E / 40. 50. 60 系列 (EP 等級) - SAFE-E Series Electro-Polishing Grade
SAFE-B / 40. 50. 60 系列 (BA 等級) - SAFE-B Series Bright Annealing Grade
SAFE 系列專為半導體、電子、醫療、生物技術和製藥行業中使用的高純度氣體系統而設計。
SAFE Series is designed for high-purity gas systems used in the semiconductor, electronics, medical, biotechnology, and pharmaceutical industries.
產品規格 (Product Specification)
| 尺寸(外殼外徑) Dimensions (outer diameter of the case) | 40mm, 50mm, 60mm |
|---|---|
| 款式 Style | 直立式 (Low mount), 背接式 (Center Back mount) |
| 對應接頭 Connection | 1/4" NPT 1/4" METAL FACE SEAL FITTINGS (公/母) *皆為 Swivel 1/4" TUBE WELDING |
| 材質 Material | 巴登管 Bourdon : SUS316L (表面處理 Surface treatment : BA, EP) 外殼 Casing : SUS304 機芯(內機) Movement : 不銹鋼 Stainless stee 蓋子 Cover : 聚碳酸酯 (PC) 錶盤 Plate : 鋁 Aluminium (白色 White) 指針 Point : 鋁合金 Aluminum Alloy (黑色 Black) |
| 精度 Accuracy | Grade A ±1.0% F.S (Dial size: 50mm, 63mm) Grade B ±2.0% F.S (Dial size: 35mm, 50mm, 63mm) |
| 使用溫度 (Ambient temperature) | -40℃ ~ +65℃ |
| 流體溫度 (Fluid temperature) | 最大 +100℃ (Max. +100℃) |
| He 洩漏率 (He Leakage rate) | 小於 1.0x10⁻¹⁰ Pa・m³/sec (less than 1.0x10⁻¹⁰ Pa・m³/sec) |
洗淨/製造/檢驗規範 (Cleaning/Manufacturing/Inspection Specifications)
| 產品 Product | SAFE-E/SAFE-B |
|---|---|
| 潔淨度 Cleanliness |
ASME B40.100 的潔淨度等級 LEVEL 4 ASME B40.100 Cleanliness LEVEL 4) |
| 洗淨 Cleaging | 超音波洗淨 (Ultrasonic cleaning) |
|
組裝/調整.校正 Assemble/adjust. correction |
組裝 Assemble : CLASS 10,000 C.R 調整.校正 adjust. correction : CLASS 100 C.R |
| 洩漏測試 Leak test | 氦氣測漏 Use Helium to test |
| 禁油、禁水 Use no oil and water | 禁油、禁水處理 Prohibition of oil and water treatment |
| 包裝 Packing | 聚乙烯材質 真空雙層包裝 (Polyethylene material. Vacuum double-layer packaging) |
壓力範圍表 (Pressure Range List)
| 壓力範圍 RANGE (psi/K) | 壓力範圍 RANGE (psi/K) | 壓力範圍 RANGE (psi/K) |
|---|---|---|
| 0-30psi/K | 0-3000psi/K | -30inHg-80psi/K |
| 0-60psi/K | 0-3500psi/K | -30inHg-90psi/K |
| 0-150psi/K | 0-3600psi/K | -30inHg-100psi/K |
| 0-200psi/K | 0-4000psi/K | -30inHg-150psi/K |
| 0-300psi/K | 0-5000psi/K | -30inHg-160psi/K |
| 0-600psi/K | 0-6000psi/K | -30inHg-200psi/K |
| 0-1000psi/K | -30inHg-15psi/K | -30inHg-300psi/K |
| 0-1500psi/K | -30inHg-30psi/K | -30inHg-500psi/K |
| 0-1600psi/K | -30inHg-40psi/K | -30inHg-600psi/K |
| 0-2000psi/K | -30inHg-60psi/K | -30inHg-1000psi/K |
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